Analysis of multiple factors and electrode velocity effect on ESD in micro-air gap

The critical characteristics of variation parameter in electrostatic discharge(ESD) were mainly affected by gas ionization condition, discharge gap length, electrode and discharge voltage. Humidity, pressure, temperature in atmosphere factors and electrode velocity have great impact on ESD process, which may lead to much distink low repeatability of results in parameter test process. We proposed a field source model to analyze the motion of electrons in an E-field, and discussed the influence on various parameters in discharge current. Using the newly invented ESD measurement system, we measured discharge current waveform under different conditions, with surface process and electron avalanche process in short-gap ESD model, we described appearance of discharge current transferring at 800v, and explained the reason of variation critical effect of electrode velocity on discharge parameters.