减轻PBGA封装中硅模热机械应力的模具边缘保护建模及工艺开发

C. Foong, K. W. Shim, Min Ding
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摘要

不同材料之间的热膨胀系数不匹配引起的机械应力是微电子封装硅模具断裂失效的主要驱动力。产生的应力集中在不同材料的界面和几何奇点处,如模具角和模具边缘。利用有限元力学模型进行应力分析表明,靠近模具角的应力比模具内部区域高30% ~ 80%。此外,由于这些高应力,还发现了大块模具复合材料内部的裂纹和模具顶部的界面分层。DEP(模具边缘保护)环氧树脂,一种低应力高CTE聚合物材料,已用于覆盖模具的角落和边缘,以降低应力水平,目的是消除与这些应力奇点相关的故障。它作为一种缓冲介质,机械地保护模具的角和边缘不与高模量成型复合材料直接接触。DEP涂层是通过将液态DEP环氧树脂涂在焊丝粘合模具区域外,并允许环氧树脂沿着模具的角落和边缘爬升来实现的。DEP点胶过程发生在电线粘合之后。在随后的成型工艺步骤中,涂有DEP的区域将与模具化合物隔离。从实验评估中观察到,DEP涂层成功地防止了模具角的开裂和分层。本文研究了DEP涂层的模拟,并讨论了将这种方案实施到大批量生产所需的DEP工艺开发。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling and process development of Die Edge Protection to alleviate thermo-mechanical stresses on silicon dies in PBGA packages
Mechanical stresses induced by the mismatch of coefficient of thermal expansion (CTE) among different materials are the major driving force of fracture failures in silicon dies of microelectronic packages. The stresses induced are concentrated at locations where different materials interfaced and geometrical singularities such as die corners and die edges. Stress analyses using finite element mechanical modeling demonstrated that the stresses close to the die corners are 30% ~ 80% higher compared to the inner regions of the die. In addition, cracks inside the bulk mold compound and interfacial delamination on top of the die have been found due to these high stresses. DEP (Die Edge Protection) epoxy, a low-stress high CTE polymeric material, has been used to cover the corners and edges of the die to reduce stress levels with the objective of eradicating failures associated with these stress singularities. It acts as a buffering medium to mechanically shield the die corners and edges from being in direct contact to the high modulus molding compound materials. The DEP coating is achieved by dispensing the liquid DEP epoxy outside the wire bonded die area and allowing the epoxy to creep up along the die corners and edges. The DEP dispense process takes place after wire bonding. In the subsequent molding process step, areas coated with DEP will be shielded from the mold compound. It was observed from experimental evaluations that the DEP coating managed to prevent die corners cracking and delamination. This paper examines the simulation of the DEP coating, and discusses the DEP process development required to implement such a scheme into high volume production.
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