M.M. El Khouly, Y. Nada, E. Hegazi, H. Ragai, M. Ghannam
{"title":"一种基于MEMS磁盘谐振器的振荡器","authors":"M.M. El Khouly, Y. Nada, E. Hegazi, H. Ragai, M. Ghannam","doi":"10.1109/ICM.2006.373270","DOIUrl":null,"url":null,"abstract":"A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.","PeriodicalId":284717,"journal":{"name":"2006 International Conference on Microelectronics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A MEMS Disk Resonator-Based Oscillator\",\"authors\":\"M.M. El Khouly, Y. Nada, E. Hegazi, H. Ragai, M. Ghannam\",\"doi\":\"10.1109/ICM.2006.373270\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.\",\"PeriodicalId\":284717,\"journal\":{\"name\":\"2006 International Conference on Microelectronics\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 International Conference on Microelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICM.2006.373270\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Conference on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2006.373270","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.
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