基于激光散斑光度法的电力电子用直接铜结合陶瓷应力条件无损测量方法

S. Muench, M. Roellig, U. Cikalova, B. Bendjus, L. Chen, S. Sudip
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引用次数: 4

摘要

电力电子应用对可靠性的要求非常高。在为半导体供电和环境温度变化时,热负载会对整个电子封装造成压力。直接铜键合(DCB)衬底由于其高导热性能在电子领域得到了广泛的应用。它们由烧结在氧化铝陶瓷片上的铜层组成。由于非常高的工艺温度,当冷却到环境温度时,沿着衬底产生热感应应力。DCB衬底通常带有残余应力,这些残余应力集中在铜结构的边缘。在使用条件下,甚至在电子制造过程中,应力集中可能增加,导致铜结构在陶瓷片上产生裂纹和贝壳状断裂,从而从衬底上脱落。为了避免出现临界开裂情况,需要了解残余应力状况。目标将是横跨DCB基板的应力映射。本文将提出一种测量应力状态的潜在方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A laser speckle photometry based non-destructive method for measuring stress conditions in direct-copper-bonded ceramics for power electronic application
Power electronic applications come along with very high requirements in terms of reliability. Thermal loadings stress whole electronic packages while powering the semiconductor and by environmental temperature changes. Direct copper bonding (DCB) substrates are widely used in electronic applications due to its high thermal conductivity performance. They consists of copper layers sintered onto an Al2O3-ceramic sheet. Because of the very high process temperature, thermal inducted stresses arise along the substrate while cooling to ambient temperatures. The DCB substrates carry residual stresses usually which are concentrated along the edges of copper structures. Under service condition or even during the electronic manufacturing process the stress concentration might increase and in consequence copper structure rip off the substrate by cracking and conchoidal fractures in the ceramic sheet. To avoid the critical cracking situation the knowledge about the residual stress condition is required. The target will be a stress mapping across the DCB substrate. Within the paper one potential approach to measure the stress condition will be presented.
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