{"title":"EUV辐射脉冲能量测量系统优化","authors":"J. Mikołajczyk, Z. Bielecki","doi":"10.1109/EURCON.2007.4400587","DOIUrl":null,"url":null,"abstract":"The paper presents a detection system for energy measurement of extreme ultraviolet radiation (EUV). The system consists of a calibrated silicon photodiode and a single multilayer mirror. It can be used for energy measurements of radiation pulses at 13.5 plusmn 0.5 nm wavelength range (FWHM = 7.3%). A construction of the system was optimized for operation with a laser-plasma source with gas puff target. The system provides energy measurements with uncertainty of 7.2%. Influence of particular system elements on uncertainty of the energy measurement.","PeriodicalId":191423,"journal":{"name":"EUROCON 2007 - The International Conference on \"Computer as a Tool\"","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"System optimization for energy measurements of EUV radiation pulses\",\"authors\":\"J. Mikołajczyk, Z. Bielecki\",\"doi\":\"10.1109/EURCON.2007.4400587\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents a detection system for energy measurement of extreme ultraviolet radiation (EUV). The system consists of a calibrated silicon photodiode and a single multilayer mirror. It can be used for energy measurements of radiation pulses at 13.5 plusmn 0.5 nm wavelength range (FWHM = 7.3%). A construction of the system was optimized for operation with a laser-plasma source with gas puff target. The system provides energy measurements with uncertainty of 7.2%. Influence of particular system elements on uncertainty of the energy measurement.\",\"PeriodicalId\":191423,\"journal\":{\"name\":\"EUROCON 2007 - The International Conference on \\\"Computer as a Tool\\\"\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-12-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EUROCON 2007 - The International Conference on \\\"Computer as a Tool\\\"\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EURCON.2007.4400587\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EUROCON 2007 - The International Conference on \"Computer as a Tool\"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EURCON.2007.4400587","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
System optimization for energy measurements of EUV radiation pulses
The paper presents a detection system for energy measurement of extreme ultraviolet radiation (EUV). The system consists of a calibrated silicon photodiode and a single multilayer mirror. It can be used for energy measurements of radiation pulses at 13.5 plusmn 0.5 nm wavelength range (FWHM = 7.3%). A construction of the system was optimized for operation with a laser-plasma source with gas puff target. The system provides energy measurements with uncertainty of 7.2%. Influence of particular system elements on uncertainty of the energy measurement.
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