基于多尺度概念的各种器件中MEMS元件可靠性建模与优化

Rohit Pathak, Satyadhar Joshi
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引用次数: 6

摘要

多种计算方法为实验和理论方法支持下的多尺度建模计算可靠性带来了强大的技术。这些方法在微机电系统(MEMS)技术中发挥着重要作用,但这些方法的分析是基于抽象层次的理论,没有对纳米级现象提出全面的解释。提出将高性能计算(HPC)与多尺度优化库结合使用,可以加快MEMS可靠性计算的速度,并对MEMS可靠性进行研究。在这项工作中,我们开发了一个库,我们可以选择不同级别的各种物理,然后计算可靠性以获得更好的准确性。本文采用MATLAB分布式计算工具箱和Sugar微机电系统仿真库进行建模和计算。它是用于MEMS的SUGAR包的扩展。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability modeling and optimization of MEMS elements in various devices using multi-scale concepts
Diverse Computational methods have brought powerful techniques to calculate reliability by multi scale modeling supported by experimental and theoretical methods. These approaches play an important role in Micro Electro Mechanical Systems (MEMS) technology where the analysis is based on abstraction level theories and no comprehensive explanation of nano scale phenomenon are proposed. It is proposed that High Performance Computing (HPC) if used with multi scale optimization library then the reliability calculation can be accelerated and also research in reliability of MEMS. In this work we have developed library where we can select the various physics at different level and then calculated reliability for better accuracy. In the proposed work, Modeling and Computation is performed using MATLAB distributed computing toolbox and Sugar MEMS simulation library. It is an extension to SUGAR package for MEMS.
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