二维效应下SiGe MOSFET阈值电压的解析建模

R. Mahajan, D. Gautam
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引用次数: 2

摘要

本文研究了伪晶SiGe结构阈值电压的动态特性。考虑短通道效应,对泊松方程进行了解析求解。分析得到的仿真结果与Silvaco TCAD的结果吻合较好。对底物浓度特定范围的模型进行了验证。所建立的分析模型也适用于高k材料结构。这项工作提出了高k SiGe MOSFET结构的紧凑解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analytical modeling of threshold voltage for SiGe MOSFET with two dimensional effects
Dynamics of threshold voltage for pseudomorphic SiGe structure is presented in this paper. Poisson's equation has been solved analytically considering short channel effects. Simulation obtained from analytical are in good agreement with the results from Silvaco TCAD. Validation of model for specific range of substrate concentration has been done. Analytical model developed can be extended for the use of high-k material structure as well. This work presenting as a compact solution for high-k SiGe MOSFET structure.
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