{"title":"基于鲁棒复用模型预测控制(RMMPC)的烤板控制","authors":"E. Joelianto, Iqbal Ginanjar Prasetia","doi":"10.1109/ICA.2011.6130151","DOIUrl":null,"url":null,"abstract":"This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused when placing a cold wafer inside. Results show that the proposed robust MMPC can outperform in attenuating disturbance compare with the MMPC and the standard MPC.","PeriodicalId":132474,"journal":{"name":"2011 2nd International Conference on Instrumentation Control and Automation","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Bake plate control using a robust multiplexed model predictive control (RMMPC)\",\"authors\":\"E. Joelianto, Iqbal Ginanjar Prasetia\",\"doi\":\"10.1109/ICA.2011.6130151\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused when placing a cold wafer inside. Results show that the proposed robust MMPC can outperform in attenuating disturbance compare with the MMPC and the standard MPC.\",\"PeriodicalId\":132474,\"journal\":{\"name\":\"2011 2nd International Conference on Instrumentation Control and Automation\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 2nd International Conference on Instrumentation Control and Automation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICA.2011.6130151\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 2nd International Conference on Instrumentation Control and Automation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICA.2011.6130151","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Bake plate control using a robust multiplexed model predictive control (RMMPC)
This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused when placing a cold wafer inside. Results show that the proposed robust MMPC can outperform in attenuating disturbance compare with the MMPC and the standard MPC.
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