一种具有优越电气特性的新型沟槽式灯

E. Kang, S. Moon, Sangsig Kim, M. Sung
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引用次数: 0

摘要

提出了一种小型侧沟电极绝缘栅双极晶体管(LTEIGBT),改进了传统侧沟电极绝缘栅双极晶体管(lighbt)和侧沟栅双极晶体管(LTIGBT)的特性。将LTEIGBT的整个电极替换为沟槽式电极。LTEIGBT的设计使装置宽度不大于19 /spl mu/m。light、LTIGBT和LTEIGBT的锁存电流密度分别为120A/cm/sup 2/、540A/cm/sup 2/和1230A/cm/sup 2/。通过在n/sup +/阴极层下面的p/sup +/阴极层直接到达阴极的电流中的空穴,LTEIGBT获得了增强的锁存能力。LTEIGBT正向阻断电压为130V。相同尺寸的常规light和lighbt分别不超过60V和100V。由于该器件采用沟槽式电极结构,电场向沟槽氧化层移动,LTEIGBT击穿发生较晚。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A novel trench-type LIGBT having superior electrical characteristics
A new small sized lateral trench electrode insulated gate bipolar transistor (LTEIGBT) was proposed to improve the characteristics of conventional lateral IGBT (LIGBT) and lateral trench gate IGBT (LTIGBT). The entire electrode of LTEIGBT was replaced with a trench-type electrode. The LTEIGBT was designed so that the width of device is no more than 19 /spl mu/m. The Latch-up current densities of LIGBT, LTIGBT and LTEIGBT were 120A/cm/sup 2/, 540A/cm/sup 2/, and 1230A/cm/sup 2/, respectively. The enhanced latch-up capability of the LTEIGBT was obtained through holes in the current directly reaching the cathode via the p/sup +/ cathode layer underneath the n/sup +/ cathode layer. The forward blocking voltage of the LTEIGBT was 130V. Conventional LIGBT and LTIGBT of the same size were no more than 60V and 100V, respectively. Because the the proposed device was constructed of trench-type electrodes, the electric field moved toward trench-oxide layer, and punch through breakdown of LTEIGBT occurs late.
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