{"title":"通过直接激光书写和化学金属化制备金属介电纳米光子材料","authors":"S. Kuebler, Yun-Sheng Chen, A. Tal","doi":"10.1117/12.760824","DOIUrl":null,"url":null,"abstract":"Interest in three-dimensional (3D) metallo-dielectric photonic crystals (MDPCs) has grown considerably given their potential applications in optics and photonics. MDPCs can exhibit intriguing and potentially useful optical properties, including ultra-wide photonic bandgaps, engineered thermal emission, and negative refractive index. Yet experimental studies of such materials remain few because of the difficulties associated with fabricating 3D micron- and sub-micron-scale metallic structures. We report a route to MDPCs based on metallization of a 3D polymeric photonic crystal (PC) fabricated by multi-photon microfabrication (MPM). Polymeric PCs having face-centered tetragonal symmetry and micrometer-scale periodicity were created using a cross-linkable acrylate or epoxide pre-polymer. The resulting PCs were metallized by electroless deposition of silver or copper. Analysis of the metallized structures in cross-section by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy shows that silver deposited conformally onto the entire micro-porous lattice. The dielectric and metallized PCs were characterized by Fourier transform infrared (FTIR) spectroscopy. The polymer photonic crystals exhibit a stop band with strong reflectance near 4 to 6 microns, depending upon the lattice period. In contrast, FTIR spectra of the metallized PCs show widened stop bands of nearly 6 microns and greater and maximum reflectance exceeding 90%. The appreciable broadening of the stop band due to the presence of the deposited metal is a result consistent with previously reported theoretical and experimental data for all-metallic 3D PCs. Thus, the approach reported here appears suitable for fabricating 3D MDPCs of many symmetries and basis sets and provides a path for integrating such structures with other micron-scale optical elements.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"146 10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization\",\"authors\":\"S. Kuebler, Yun-Sheng Chen, A. Tal\",\"doi\":\"10.1117/12.760824\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Interest in three-dimensional (3D) metallo-dielectric photonic crystals (MDPCs) has grown considerably given their potential applications in optics and photonics. MDPCs can exhibit intriguing and potentially useful optical properties, including ultra-wide photonic bandgaps, engineered thermal emission, and negative refractive index. Yet experimental studies of such materials remain few because of the difficulties associated with fabricating 3D micron- and sub-micron-scale metallic structures. We report a route to MDPCs based on metallization of a 3D polymeric photonic crystal (PC) fabricated by multi-photon microfabrication (MPM). Polymeric PCs having face-centered tetragonal symmetry and micrometer-scale periodicity were created using a cross-linkable acrylate or epoxide pre-polymer. The resulting PCs were metallized by electroless deposition of silver or copper. Analysis of the metallized structures in cross-section by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy shows that silver deposited conformally onto the entire micro-porous lattice. The dielectric and metallized PCs were characterized by Fourier transform infrared (FTIR) spectroscopy. The polymer photonic crystals exhibit a stop band with strong reflectance near 4 to 6 microns, depending upon the lattice period. In contrast, FTIR spectra of the metallized PCs show widened stop bands of nearly 6 microns and greater and maximum reflectance exceeding 90%. The appreciable broadening of the stop band due to the presence of the deposited metal is a result consistent with previously reported theoretical and experimental data for all-metallic 3D PCs. Thus, the approach reported here appears suitable for fabricating 3D MDPCs of many symmetries and basis sets and provides a path for integrating such structures with other micron-scale optical elements.\",\"PeriodicalId\":130723,\"journal\":{\"name\":\"SPIE MOEMS-MEMS\",\"volume\":\"146 10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE MOEMS-MEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.760824\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.760824","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization
Interest in three-dimensional (3D) metallo-dielectric photonic crystals (MDPCs) has grown considerably given their potential applications in optics and photonics. MDPCs can exhibit intriguing and potentially useful optical properties, including ultra-wide photonic bandgaps, engineered thermal emission, and negative refractive index. Yet experimental studies of such materials remain few because of the difficulties associated with fabricating 3D micron- and sub-micron-scale metallic structures. We report a route to MDPCs based on metallization of a 3D polymeric photonic crystal (PC) fabricated by multi-photon microfabrication (MPM). Polymeric PCs having face-centered tetragonal symmetry and micrometer-scale periodicity were created using a cross-linkable acrylate or epoxide pre-polymer. The resulting PCs were metallized by electroless deposition of silver or copper. Analysis of the metallized structures in cross-section by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy shows that silver deposited conformally onto the entire micro-porous lattice. The dielectric and metallized PCs were characterized by Fourier transform infrared (FTIR) spectroscopy. The polymer photonic crystals exhibit a stop band with strong reflectance near 4 to 6 microns, depending upon the lattice period. In contrast, FTIR spectra of the metallized PCs show widened stop bands of nearly 6 microns and greater and maximum reflectance exceeding 90%. The appreciable broadening of the stop band due to the presence of the deposited metal is a result consistent with previously reported theoretical and experimental data for all-metallic 3D PCs. Thus, the approach reported here appears suitable for fabricating 3D MDPCs of many symmetries and basis sets and provides a path for integrating such structures with other micron-scale optical elements.