通过直接激光书写和化学金属化制备金属介电纳米光子材料

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI:10.1117/12.760824
S. Kuebler, Yun-Sheng Chen, A. Tal
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引用次数: 0

摘要

三维(3D)金属介电光子晶体(MDPCs)在光学和光子学方面的潜在应用使其受到广泛关注。MDPCs可以表现出有趣和潜在有用的光学特性,包括超宽光子带隙,工程热发射和负折射率。然而,由于制造三维微米和亚微米尺度金属结构的困难,对这种材料的实验研究仍然很少。我们报道了一种基于多光子微加工(MPM)制备的三维聚合物光子晶体(PC)的金属化途径。采用交联丙烯酸酯或环氧化物预聚物制备了具有面心四方对称和微米级周期性的聚合物pc。所得的pc通过化学沉积银或铜而金属化。通过扫描电子显微镜(SEM)和能量色散x射线能谱对金属化结构的截面分析表明,银在整个微孔晶格上共形沉积。采用傅里叶变换红外光谱(FTIR)对电介质和金属化pc进行了表征。聚合物光子晶体在晶格周期不同的情况下,在4 ~ 6微米处呈现出具有强反射率的禁带。相比之下,金属化pc的FTIR光谱显示出近6微米的宽阻带,最大反射率超过90%。由于沉积金属的存在,阻挡带明显变宽,这与先前报道的全金属3D pc的理论和实验数据一致。因此,本文报道的方法似乎适用于制造许多对称和基集的3D mdpc,并为将此类结构与其他微米级光学元件集成提供了途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization
Interest in three-dimensional (3D) metallo-dielectric photonic crystals (MDPCs) has grown considerably given their potential applications in optics and photonics. MDPCs can exhibit intriguing and potentially useful optical properties, including ultra-wide photonic bandgaps, engineered thermal emission, and negative refractive index. Yet experimental studies of such materials remain few because of the difficulties associated with fabricating 3D micron- and sub-micron-scale metallic structures. We report a route to MDPCs based on metallization of a 3D polymeric photonic crystal (PC) fabricated by multi-photon microfabrication (MPM). Polymeric PCs having face-centered tetragonal symmetry and micrometer-scale periodicity were created using a cross-linkable acrylate or epoxide pre-polymer. The resulting PCs were metallized by electroless deposition of silver or copper. Analysis of the metallized structures in cross-section by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy shows that silver deposited conformally onto the entire micro-porous lattice. The dielectric and metallized PCs were characterized by Fourier transform infrared (FTIR) spectroscopy. The polymer photonic crystals exhibit a stop band with strong reflectance near 4 to 6 microns, depending upon the lattice period. In contrast, FTIR spectra of the metallized PCs show widened stop bands of nearly 6 microns and greater and maximum reflectance exceeding 90%. The appreciable broadening of the stop band due to the presence of the deposited metal is a result consistent with previously reported theoretical and experimental data for all-metallic 3D PCs. Thus, the approach reported here appears suitable for fabricating 3D MDPCs of many symmetries and basis sets and provides a path for integrating such structures with other micron-scale optical elements.
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