亚纳米安培电流在ATE环境下的高精度测量

Keno Sato, Takayuki Nakatani, Takashi Ishida, Toshiyuki Okamoto, Tamotsu Ichikawa, Shogo Katayama, Gaku Ogihara, Daisuke Iimori, Yujie Zhao, Jianglin Wei, A. Kuwana, K. Hatayama, Haruo Kobayashi
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However, the conventional method needs a large resistor (Rm, MΩ-order in Fig. 1) which makes the testing slow, and the ATE environment is noisy.Research Target: Our target is the development of a testing technique to measure the current in the order of nano or sub-nano ampere with high linearity in the noisy ATE environment and in short time as well as with only additional low cost built-out self-test (BOST) circuits.Approach: Fig. 2 shows the proposed current measurement circuits. The current under test is converted to the voltage through an op-amp and a resistor Rm of 10kΩ, and it is then converted to the AC voltage; these conversions are done with small BOST circuits. The AC voltage is amplified and converted to the digital signal through an AC amp, a sample/hold circuit and an ADC. FFT is performed and its power spectrum is calculated; the input current value is obtained. The resistor (Rm) of 10k generates spike noises which are spurious components in the power spectrum. However, usage of the sample/hold circuit reduces their effects. Thanks to the DC-AC conversion, the measurement accuracy is not degraded by the system noise in the low frequency region. The nano-ampere current and the resistor of 10kΩ produces several tens μV level voltage and our previous research in [1, 2] shows that the DC-AC conversion method can measure this level of the voltage accurately and in short time. Also, its multi-channel measurement is possible.Experiment Verification: Preliminary experiment with the prototype system in Fig. 2 was performed and its measured result is shown in Fig. 3. The measurement circuit gain in Fig. 2 was calibrated with 1.0nA input current (Iin), which corresponds to Vin of 10.0μV. Also an offset of 0.2μV due to electromotive force (EMF) was calibrated. We see in Fig. 3 that the proposed method can measure the current as low as 50pA. So far EMF limits the lowest measurable current. 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引用次数: 0

摘要

背景:在物联网系统设备中,电流变得越来越小,它们必须使用硬币电池运行十年。在批量生产运输阶段,需要对其进行准确、快速的测量。然而,传统方法需要一个大的电阻(图1中的Rm, MΩ-order),这使得测试速度慢,并且ATE环境有噪声。研究目标:我们的目标是开发一种测试技术,在嘈杂的ATE环境中,在短时间内以高线性度测量纳米或亚纳米安培数量级的电流,并且只需要额外的低成本内置自检(BOST)电路。方法:图2显示了提出的电流测量电路。被测电流通过运算放大器和电阻Rm 10kΩ转换为电压,然后转换为交流电压;这些转换是用小的BOST电路完成的。交流电压通过交流放大器、采样/保持电路和ADC被放大并转换为数字信号。进行FFT并计算其功率谱;得到输入电流值。10k的电阻Rm产生的尖峰噪声是功率谱中的杂散分量。然而,采样/保持电路的使用降低了它们的影响。由于采用直流-交流转换,测量精度不受低频区系统噪声的影响。纳米安培电流与10kΩ电阻器产生几十μV级别的电压,我们在[1,2]中的研究表明,直流-交流转换方法可以在短时间内准确测量出这一级别的电压。此外,它的多通道测量是可能的。实验验证:对图2中的原型系统进行了初步实验,测量结果如图3所示。图2中的测量电路增益以1.0nA的输入电流(Iin)进行校准,对应的Vin为10.0μV。对电动势(EMF)造成的0.2μV偏置进行了标定。从图3中可以看出,本文提出的方法可以测量低至50pA的电流。到目前为止,EMF限制了最低可测量电流。图4显示了在1.0nA条件下不取平均值的100次测量。每个测量电流值由k点FFT以25.6 ksps, 16位ADC (myDAQ)使用,测量时间为40ms获得。实测数据在0.94nA ~ 1.07nA范围内;变化范围为0.13nAp−p。结论:建立了一种在ATE环境下利用IV转换和DC-AC转换进行低至50pA的快速、准确电流测量的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High Precision Measurement of Sub-Nano Ampere Current in ATE Environment
Background: In IoT system devices, currents become smaller and they have to operate for ten years with a coin cell battery. Then their accurate and fast measurement is required at the mass production shipping stage. However, the conventional method needs a large resistor (Rm, MΩ-order in Fig. 1) which makes the testing slow, and the ATE environment is noisy.Research Target: Our target is the development of a testing technique to measure the current in the order of nano or sub-nano ampere with high linearity in the noisy ATE environment and in short time as well as with only additional low cost built-out self-test (BOST) circuits.Approach: Fig. 2 shows the proposed current measurement circuits. The current under test is converted to the voltage through an op-amp and a resistor Rm of 10kΩ, and it is then converted to the AC voltage; these conversions are done with small BOST circuits. The AC voltage is amplified and converted to the digital signal through an AC amp, a sample/hold circuit and an ADC. FFT is performed and its power spectrum is calculated; the input current value is obtained. The resistor (Rm) of 10k generates spike noises which are spurious components in the power spectrum. However, usage of the sample/hold circuit reduces their effects. Thanks to the DC-AC conversion, the measurement accuracy is not degraded by the system noise in the low frequency region. The nano-ampere current and the resistor of 10kΩ produces several tens μV level voltage and our previous research in [1, 2] shows that the DC-AC conversion method can measure this level of the voltage accurately and in short time. Also, its multi-channel measurement is possible.Experiment Verification: Preliminary experiment with the prototype system in Fig. 2 was performed and its measured result is shown in Fig. 3. The measurement circuit gain in Fig. 2 was calibrated with 1.0nA input current (Iin), which corresponds to Vin of 10.0μV. Also an offset of 0.2μV due to electromotive force (EMF) was calibrated. We see in Fig. 3 that the proposed method can measure the current as low as 50pA. So far EMF limits the lowest measurable current. Fig. 4 shows 100 times of measurements for 1.0nA without averaging. Each measured current value is obtained by 1K-point FFT with 25.6 ksps, 16-bit ADC (myDAQ) usage and the measurement time of 40ms. The measured data is within 0.94nA to 1.07nA; the variation range is 0.13nAp−p.Conclusion: A method of fast and accurate current measurement as low as 50pA using IV conversion and DC-AC conversion in ATE environment has been developed.
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