用透射电镜纳米束衍射分度技术鉴定铜-铝金属间相

Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2014-09-18 DOI:10.1109/IPFA.2014.6898172

F. K. Yong

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引用次数: 0

摘要

本文介绍了电子衍射光斑分度法在铜丝键合金属间相识别中的应用。改进了标准扫描透射电子显微镜(STEM)技术，利用会聚电子探针产生平行纳米光束形成电子衍射光斑，通过对衍射光斑的标引，确定了铜丝键合中的CuAl(η2)和CuAl2(θ)相。

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Identification of Cu-Al intermetallic phases of copper wire bonding using TEM nano beam diffraction indexing technique

The paper shares the application of electron diffraction spot indexing to identify intermetallic phases in copper wire bond. Standard Scanning Transmission Electron Microscopy (STEM) technique with a converged electron probe was modified to produce parallel nano beam for forming electron diffraction spot patterns, CuAl(η2)and CuAl2(θ) phases in copper wire bond were identified by indexing the diffraction spots.

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Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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