高频高压压电微型泵的仿真分析

2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2022-10-11 DOI:10.1109/SPAWDA56268.2022.10046021

Jiafeng Ni, W. Xuan, Yilin Li, Wenjun Li, S. Dong, Jikui Luo

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引用次数: 0

摘要

提出了一种基于合成射流结构的集成阀式压电微泵。压电微型泵的尺寸约为16mm*16mm*3mm，工作在11649Hz的一阶谐振频率下。当矩形波驱动信号的幅值为24V时，压电微泵的平均输出流量约为139.5 mL /min。最大输出压力可达30kpa以上。与现有的压电泵相比，它具有高压保持和体积小的优点，在智能压力手表等可穿戴设备中具有潜在的应用前景。

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Simulation Analysis of High Frequency and High Pressure Piezoelectric Micro-Pump

In this paper, a piezoelectric micro-pump with integrated valve based on synthetic jet structure is proposed. The piezoelectric micro-pump possesses a size of about 16mm*16mm*3mm, which works at the first-order resonant frequency of 11649Hz. With the rectangular wave driving signal has the amplitude of 24V, the average output flow of the piezoelectric micro-pump is about 139.5 mL /min. The maximum output pressure can reach more than 30 kPa. Compared with the existing piezoelectric pump, it has the advantages of high-pressure retention and small size, indicating a potential application in wearable device such as smart pressure watch.

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2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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