基于非线性模型的微机电系统微镜控制

2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA) Pub Date : 2018-07-01 DOI:10.1109/MESA.2018.8449208

Yonghong Tan, Ruili Dong

{"title":"基于非线性模型的微机电系统微镜控制","authors":"Yonghong Tan, Ruili Dong","doi":"10.1109/MESA.2018.8449208","DOIUrl":null,"url":null,"abstract":"This paper presents a nonlinear model based control scheme for angular deflection of electromagnetically actuated MEMS micro-mirror. As the electromagnetic micro-mirror is involved with both underdamped characteristic and hysteresis phenomenon, the control of angular deflection to derive fast and accurate positioning is a challenge. In this paper, a nonlinear dynamic model is proposed to depict the characteristic of the electromagnetic micro-mirror. Then, based on the nonlinear dynamic model, a nonlinear model based control strategy is developed for the angle control of the micro-mirror.","PeriodicalId":138936,"journal":{"name":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Nonlinear Model Based Control of MEMS Micro-Mirror\",\"authors\":\"Yonghong Tan, Ruili Dong\",\"doi\":\"10.1109/MESA.2018.8449208\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a nonlinear model based control scheme for angular deflection of electromagnetically actuated MEMS micro-mirror. As the electromagnetic micro-mirror is involved with both underdamped characteristic and hysteresis phenomenon, the control of angular deflection to derive fast and accurate positioning is a challenge. In this paper, a nonlinear dynamic model is proposed to depict the characteristic of the electromagnetic micro-mirror. Then, based on the nonlinear dynamic model, a nonlinear model based control strategy is developed for the angle control of the micro-mirror.\",\"PeriodicalId\":138936,\"journal\":{\"name\":\"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MESA.2018.8449208\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MESA.2018.8449208","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

提出了一种基于非线性模型的电磁驱动微机电系统微反射镜角偏转控制方案。由于电磁微镜既具有欠阻尼特性，又存在滞回现象，因此控制微镜的角偏转以实现快速准确的定位是一个挑战。本文提出了一种描述电磁微镜特性的非线性动力学模型。然后，基于非线性动力学模型，提出了一种基于非线性模型的微反射镜角度控制策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nonlinear Model Based Control of MEMS Micro-Mirror

This paper presents a nonlinear model based control scheme for angular deflection of electromagnetically actuated MEMS micro-mirror. As the electromagnetic micro-mirror is involved with both underdamped characteristic and hysteresis phenomenon, the control of angular deflection to derive fast and accurate positioning is a challenge. In this paper, a nonlinear dynamic model is proposed to depict the characteristic of the electromagnetic micro-mirror. Then, based on the nonlinear dynamic model, a nonlinear model based control strategy is developed for the angle control of the micro-mirror.

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来源期刊

2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)

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