基于机械可调谐光子晶体的集成光谱仪和位移传感器

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051508

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. V. van Otten, A. Fiore

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引用次数: 0

摘要

提出了一种基于静电可调谐双膜光子晶体腔的纳米光电传感器。我们演示了输入光的自由空间和波导耦合方案，而读出由集成量子点光电二极管提供。

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Integrated spectrometer and displacement sensor based on mechanically tunable photonic crystals

We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is provided by an integrated quantum dot photodiode.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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