建模和优化的静电驱动的无阀微型泵使用硅扣膜

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings Pub Date : 1997-10-07 DOI:10.1109/SMICND.1997.651570

D. Popescu, P. Lerch, C. Dunare, D. Dascalu

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引用次数: 3

摘要

设计了一种用于微泵驱动的静电致动器。为了在kHz频率范围内获得亚微米振幅的谐波振荡的小驱动电压，以及为了开发改进的外力，对执行器进行了建模和优化。

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Modelling and optimisation for an electrostatic actuation of a valveless micropump using a silicon buckled membrane

An electrostatic actuator for micropumps driving has been designed. Modelling and optimisation of the actuator have been made for obtaining small driving voltages for harmonic oscillations in the kHz frequency range with submicrometer amplitudes and for developing improved external forces.

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来源期刊

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings

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