用于高温SiC功率模块的裸DBA衬底上的微片状银膏烧结

Chuantong Chen, Zheng Zhang, Yang Liu, K. Suganuma
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引用次数: 0

摘要

本研究在SiC电源模块中,在250℃无压力条件下,在裸DBA (Al/AlN/Al)衬底上实现了银片颗粒膏状烧结体的连接,剪切强度达到33.6 MPa。烧结后Ag的微观结构和Ag/Al的结合界面表明,银浆具有良好的烧结性能。银片颗粒与铝表面紧密结合,形成了原位银纳米颗粒。通过250℃高温时效和-50 ~ 250℃热冲击试验,研究了SiC-DBA接头结构的高温可靠性。时效1000 h后,抗剪强度仍大于30 MPa。热冲击试验后Al层发生较大变形,导致界面产生裂纹,抗剪强度降低。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro-flake Ag paste sinter joining on bare DBA substrate for high temperature SiC power modules
In this study, Ag flake particles paste sinter joining on a bare DBA (Al/AlN/Al) substrate at temperature of 250 °C without pressure was achieved with a robust shear strength of 33.6 MPa in a SiC power module. The microstructure of sintered Ag and the bonded interface of Ag/Al indicated that the excellent sinter ability of the Ag paste. The Ag nanoparticles were in-situ-formed from the Ag flake particles, which tight bonding to the Al surface. High-temperature reliability of the SiC-DBA joint structure were investigated by high-temperature aging at 250 °C, and thermal shock test from -50 to 250 °C. The shear strength still larger than 30 MPa after 1000 h aging. Large deformation of Al layer occurred after thermal shock test, leading to the interface cracks generation and shear strength decrease.
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