产量应用的预采绒设计:基于差异、模式分析和风险评分的设计

R. Salem, Vic Vadi, A. Pinto, P. Pathak, Ya-Chieh Lai, Frank Gennari, P. Hurat
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引用次数: 1

摘要

集成电路制造的复杂性导致了缺陷限制和参数限制产量的降低。在前沿技术中,硅的学习是非常有限的,特别是在技术发展的早期阶段。在这项工作中,采用设计差异方法引入了一种新颖的预剔除和预掩模制造验证方法,以确定以前产品中从未引入的新“铸造厂未知”图案,根据其潜在的制造风险对其进行评分,并识别可疑的产量减损图案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pre-Tapeout Design for Yield Application: Design based Diffing, Pattern Analytics and Risk Scoring
Integrated Circuit manufacturing complexities have resulted in decreased defect limited and parametric limited yields. In leading-edge technologies, silicon learnings are very limited, especially in the early phase of the technology development. In this work, a novel approach of pre-tapeout and pre-mask making verification is introduced using a design diffing methodology to determine a population of new “foundry-unknown” patterns that were never introduced in previous products, scoring them based on their potential manufacturing risk, and identifying suspected yield detractor patterns.
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