{"title":"具有颗粒膜共隧道抑制器的单电子器件","authors":"A. Orlov, Xiangning Luo, T. Kosel, G. Snider","doi":"10.1109/DRC.2006.305081","DOIUrl":null,"url":null,"abstract":"Single-electron devices where a well-determined number of electrons can be controllably transferred continue to attract significant attention as one of the promising devices for applications in future digital circuits and metrology. However, the family of devices based upon precise transfer of single electrons (single-electron pumps, turnstiles, traps, latches and Quantumdot Cellular Automata (QCA) ) suffers from errors caused by cotunneling [1]. Cotunneling, a macroscopic quantum process, impairs the operation of devices where charge transfer is actuated by controllable Coulomb barriers, because it opens a classically prohibited channel for charge transfer under that barrier. A traditional way to reduce the cotunneling [2] is to increase the number of tunnel junctions in the device, N, because cotunneling current scales as I V 2N-1. For small biases the cotunneling current is thus significantly reduced. In practice, this approach has a significant drawback due to the inevitable presence of random background charges on the islands of the array. The need to individually adjust the random offset charges drastically complicates the operation and tuning of the devices. Here we present a different approach to suppress the cotunneling using a granulated metal film (Cr evaporated in 02 ambient) (Fig. 1) with weakly insulating properties. First, we fabricated and tested a single-electron transistor (SET) where suppression of the cotunneling is achieved by replacing the traditional metal island with a granulated metal film (Fig. 2). The SET has a characteristic charging energy defined by the welldefined Al/AlOx junctions while strongly suppressing the cotunneling by electron scattering in the granulated metal island (Fig 3). The value of the charging energy of the SET, EcSET z 0.27 meV exceeds the activation energy within the film, AE, by more than one order of magnitude. Therefore, with respect to the external gate, the granulated metal island can be viewed as a \"good\" metal and CBOs are completely defined by the larger scale parameter, EcSET >> AE. Second, using this design, we fabricated and tested a single-electron latch which utilizes this technology to achieve cotunneling suppression. A single-electron latch [3] consists of three dots connected in series by tunnel junctions. To achieve memory function in a latch the cotunneling must be suppressed. In previous demonstrations of single electron latches lithographically defined multiple tunnel junctions (MTJ) were used to connect the dots in a latch. The use of MTJs, however, requires complicated cancellation of the background charges affecting parasitic islands of the MTJs. In this work we use a granulated metal oxide film as the material for the middle dot (Fig. 4) that also acts as a cotunneling suppressor, replacing lithographically defined MTJs. The granulated metal film acts as a network of tunnel junctions and thus hampers the cotunneling while the presence of random offset charges localized in the oxidized grain boundaries makes this network of junctions insensitive to the external gate [4]. The experiments demonstrate the operation of the latch at low temperature (Fig. 5), with latching times greater than 1 s, and unlike devices fabricated using lithographically defined MTJs, no background charge compensation is required. This work was supported by the MRSEC Center for Nanoscopic Materials Design of the National Science Foundation under Award No. DMR-0080016.","PeriodicalId":259981,"journal":{"name":"2006 64th Device Research Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Single-electron devices with granulated film cotunneling suppressors\",\"authors\":\"A. Orlov, Xiangning Luo, T. Kosel, G. Snider\",\"doi\":\"10.1109/DRC.2006.305081\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Single-electron devices where a well-determined number of electrons can be controllably transferred continue to attract significant attention as one of the promising devices for applications in future digital circuits and metrology. However, the family of devices based upon precise transfer of single electrons (single-electron pumps, turnstiles, traps, latches and Quantumdot Cellular Automata (QCA) ) suffers from errors caused by cotunneling [1]. Cotunneling, a macroscopic quantum process, impairs the operation of devices where charge transfer is actuated by controllable Coulomb barriers, because it opens a classically prohibited channel for charge transfer under that barrier. A traditional way to reduce the cotunneling [2] is to increase the number of tunnel junctions in the device, N, because cotunneling current scales as I V 2N-1. For small biases the cotunneling current is thus significantly reduced. In practice, this approach has a significant drawback due to the inevitable presence of random background charges on the islands of the array. The need to individually adjust the random offset charges drastically complicates the operation and tuning of the devices. Here we present a different approach to suppress the cotunneling using a granulated metal film (Cr evaporated in 02 ambient) (Fig. 1) with weakly insulating properties. First, we fabricated and tested a single-electron transistor (SET) where suppression of the cotunneling is achieved by replacing the traditional metal island with a granulated metal film (Fig. 2). The SET has a characteristic charging energy defined by the welldefined Al/AlOx junctions while strongly suppressing the cotunneling by electron scattering in the granulated metal island (Fig 3). The value of the charging energy of the SET, EcSET z 0.27 meV exceeds the activation energy within the film, AE, by more than one order of magnitude. Therefore, with respect to the external gate, the granulated metal island can be viewed as a \\\"good\\\" metal and CBOs are completely defined by the larger scale parameter, EcSET >> AE. Second, using this design, we fabricated and tested a single-electron latch which utilizes this technology to achieve cotunneling suppression. A single-electron latch [3] consists of three dots connected in series by tunnel junctions. To achieve memory function in a latch the cotunneling must be suppressed. In previous demonstrations of single electron latches lithographically defined multiple tunnel junctions (MTJ) were used to connect the dots in a latch. The use of MTJs, however, requires complicated cancellation of the background charges affecting parasitic islands of the MTJs. In this work we use a granulated metal oxide film as the material for the middle dot (Fig. 4) that also acts as a cotunneling suppressor, replacing lithographically defined MTJs. The granulated metal film acts as a network of tunnel junctions and thus hampers the cotunneling while the presence of random offset charges localized in the oxidized grain boundaries makes this network of junctions insensitive to the external gate [4]. The experiments demonstrate the operation of the latch at low temperature (Fig. 5), with latching times greater than 1 s, and unlike devices fabricated using lithographically defined MTJs, no background charge compensation is required. 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引用次数: 0
摘要
单电子器件,其中一个确定的电子数量可以控制转移继续吸引显著的关注,作为一个有前途的器件应用在未来的数字电路和计量。然而,基于单电子精确转移的器件家族(单电子泵、旋转门、陷阱、锁存器和量子点元胞自动机(QCA))存在由共隧道效应引起的误差[1]。共隧道是一种宏观量子过程,它破坏了由可控库仑势垒驱动电荷转移的器件的运行,因为它在该势垒下打开了一个经典禁止的电荷转移通道。减少共隧道效应的一种传统方法[2]是增加器件中的隧道结数N,因为共隧道电流的尺度为I V 2N-1。对于小偏置,共隧电流因此显著减小。在实践中,这种方法有一个明显的缺点,由于不可避免地存在随机背景电荷在阵岛。单独调整随机偏移电荷的需要大大复杂化了设备的操作和调谐。在这里,我们提出了一种不同的方法来抑制共隧道,使用颗粒状金属薄膜(在02环境中蒸发的Cr)(图1),具有弱绝缘性能。首先,我们制作并测试了一个单电子晶体管(SET),其中通过用粒状金属薄膜代替传统的金属岛来抑制共隧效应(图2)。SET具有由定义良好的Al/AlOx结定义的特征充电能量,同时通过粒状金属岛中的电子散射来强烈抑制共隧效应(图3)。EcSET z 0.27 meV比薄膜内的活化能AE高出一个数量级以上。因此,对于外栅而言,颗粒状金属岛可以视为“好”金属,cbo完全由更大尺度参数EcSET >> AE定义。其次,利用该设计,我们制作并测试了利用该技术实现共隧道抑制的单电子锁存器。单电子锁存器[3]由三个点通过隧道结串联而成。为了在锁存器中实现记忆功能,必须抑制共隧道效应。在先前的单电子锁存器演示中,采用光刻定义的多个隧道结(MTJ)来连接锁存器中的点。然而,使用mtj需要复杂地消除影响mtj寄生岛的背景电荷。在这项工作中,我们使用颗粒状金属氧化膜作为中间点的材料(图4),它也作为共隧道抑制剂,取代光刻定义的mtj。粒状金属薄膜充当隧道结网络,从而阻碍了共隧道,而氧化晶界中存在的随机偏移电荷使该结网络对外部栅极不敏感[4]。实验证明了锁存器在低温下的操作(图5),锁存时间大于1s,并且与使用光刻定义的MTJs制造的器件不同,不需要背景电荷补偿。本研究由国家科学基金MRSEC纳米材料设计中心资助,项目编号:dmr - 0080016。
Single-electron devices with granulated film cotunneling suppressors
Single-electron devices where a well-determined number of electrons can be controllably transferred continue to attract significant attention as one of the promising devices for applications in future digital circuits and metrology. However, the family of devices based upon precise transfer of single electrons (single-electron pumps, turnstiles, traps, latches and Quantumdot Cellular Automata (QCA) ) suffers from errors caused by cotunneling [1]. Cotunneling, a macroscopic quantum process, impairs the operation of devices where charge transfer is actuated by controllable Coulomb barriers, because it opens a classically prohibited channel for charge transfer under that barrier. A traditional way to reduce the cotunneling [2] is to increase the number of tunnel junctions in the device, N, because cotunneling current scales as I V 2N-1. For small biases the cotunneling current is thus significantly reduced. In practice, this approach has a significant drawback due to the inevitable presence of random background charges on the islands of the array. The need to individually adjust the random offset charges drastically complicates the operation and tuning of the devices. Here we present a different approach to suppress the cotunneling using a granulated metal film (Cr evaporated in 02 ambient) (Fig. 1) with weakly insulating properties. First, we fabricated and tested a single-electron transistor (SET) where suppression of the cotunneling is achieved by replacing the traditional metal island with a granulated metal film (Fig. 2). The SET has a characteristic charging energy defined by the welldefined Al/AlOx junctions while strongly suppressing the cotunneling by electron scattering in the granulated metal island (Fig 3). The value of the charging energy of the SET, EcSET z 0.27 meV exceeds the activation energy within the film, AE, by more than one order of magnitude. Therefore, with respect to the external gate, the granulated metal island can be viewed as a "good" metal and CBOs are completely defined by the larger scale parameter, EcSET >> AE. Second, using this design, we fabricated and tested a single-electron latch which utilizes this technology to achieve cotunneling suppression. A single-electron latch [3] consists of three dots connected in series by tunnel junctions. To achieve memory function in a latch the cotunneling must be suppressed. In previous demonstrations of single electron latches lithographically defined multiple tunnel junctions (MTJ) were used to connect the dots in a latch. The use of MTJs, however, requires complicated cancellation of the background charges affecting parasitic islands of the MTJs. In this work we use a granulated metal oxide film as the material for the middle dot (Fig. 4) that also acts as a cotunneling suppressor, replacing lithographically defined MTJs. The granulated metal film acts as a network of tunnel junctions and thus hampers the cotunneling while the presence of random offset charges localized in the oxidized grain boundaries makes this network of junctions insensitive to the external gate [4]. The experiments demonstrate the operation of the latch at low temperature (Fig. 5), with latching times greater than 1 s, and unlike devices fabricated using lithographically defined MTJs, no background charge compensation is required. This work was supported by the MRSEC Center for Nanoscopic Materials Design of the National Science Foundation under Award No. DMR-0080016.