一种适用于细管的超低流量超声液体流量计的研制

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993693

H. Ishikawa, M. Takamoto, K. Shimizu, H. Monji, G. Matsui

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引用次数: 7

摘要

研制了一种新型的超声波液体流量计，用于测量非常小的流量。该流量计由小圆盘式超声波换能器和直径小于1mm的测量管组成。测量管通过超声波换能器两次，形成环路特征。在小于1ml/min的极低流速下，可以准确稳定地测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of a new ultrasonic liquid flowmeter for very low flow rate applicable to a thin pipe

A new ultrasonic liquid flowmeter has been developed to measure very low flow rate. This flow meter consists of small disk ultrasonic transducers and measuring pipe whose diameter is less than 1 mm. The measuring pipe passed through the ultrasonic transducer two times making the loop feature. A very low flow rate less than 1ml/min can be measured accurately and stably.

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来源期刊

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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