TEM单元的实现

M. Mierka
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引用次数: 2

摘要

本文描述了基于两年前由FEI STU电子工程研究所的一个团队提出的理论,试图构建TEM单元的方法。通过测量TEM单元的线性幅值和驻波比,本文还找到了终端阻抗的调整方法。TEM单元的目的是为MEMS等结构产生合适的电磁场。具有MEMS结构的TEM单元可用于距离,力或重量测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Realization of a TEM Cell
The paper deals with the description of the methods trying to build a TEM cell, based on the theory that was presented two years ago by a team from the Institute of Electrical Engineering, FEI STU. The adjustment of terminating impedance with measurements of linear magnitude and VSWR of TEM cell can be found in this paper too. The aim of the TEM cell is to generate appropriate EM field for structures like MEMS. The TEM cell with MEMS structure can be used for distance, force, or weight measurements.
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