基于mems的恶劣环境全无源无线压力传感器的设计

Romain Alcesilas, P. Rey, C. Jouvaud, M. Sansa, J. Bastien, C. Delaveaud
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引用次数: 0

摘要

在本文中,我们提出了一种新的无源和无线压力传感器,用于恶劣环境应用,将MEMS压力传感器与超高频天线相结合。这种传感器基于一种薄膜,在外部压力下会发生偏转,从而改变其电容,从而改变天线的谐振频率。在这里,我们介绍了传感器和天线的建模和协同设计,并提出了在CEA-Leti洁净室中200毫米的制造工艺。通过分析模型和仿真,我们证明了理论灵敏度高达每巴天线谐振频率变化的9.8%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design of a MEMS-Based Fully Passive Wireless Pressure Sensor for Harsh Environments
In this paper, we propose a novel passive and wireless pressure sensor for harsh environment applications, combining a MEMS pressure sensor with a UHF antenna. The sensor is based on a membrane that deflects under external pressure, modifying its capacitance and therefore the resonant frequency of the antenna. Here we present the modelling and codesign of the sensor and the antenna and we propose a 200 mm fabrication process in the CEA-Leti clean room. From analytical models and simulations, we show a theoretical sensitivity up to 9.8% of antenna resonant frequency variation per bar.
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