n型低温多晶硅薄膜晶体管的异常“横扫应力”诱发退化

Dapeng Zhou, Mingxiang Wang, Meng Zhang, Han Hao, Dongli Zhang, M. Wong
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引用次数: 1

摘要

在n型金属诱导的横向结晶低温薄膜晶体管(TFTs)中首次观察到异常的“横扫应力”诱导退化现象。关键应力参数包括最大漏偏置、扫频时间和扫频次数。只有当最大漏极偏压超过临界值时,才会发生退化。转移和输出特性的退化与热载流子(HC)的退化非常相似。但扫描时间越长,降解幅度越大,与动态HC降解相反。此外,这种降解只能在低温结晶的tft中观察到。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Anomalous “sweeping stress” induced degradation in n-type low temperature poly-Si thin film transistors
Anomalous “sweeping stress” induced degradation is first observed in n-type metal-induced laterally crystallized low temperature thin film transistors (TFTs). Key stress parameters include the maximum drain bias, the sweeping time and the number of sweeping. Degradation occurs only when the maximum drain bias exceeds a critical value. Both transfer and output characteristic degradation is found much similar to that of hot carrier (HC) degradation. But longer sweeping time causes larger degradation, which is opposite to that in dynamic HC degradation. Besides, such degradation can only be observed in low temperature crystallized TFTs.
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