F/sub - 2/准分子激光与各类合成SiO/sub - 2/玻璃的相互作用:迈向第三代合成二氧化硅

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI:10.1109/IMNC.1999.797474

H. Hosono, M. Mizuguchi, T. Ogawa

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引用次数: 0

摘要

研究了F/sub / 2激光辐照前后合成二氧化硅试样的紫外-紫外透射光谱。样品中的吸收边因样品而异:与湿SiO/ sub2 / (155 nm)或干SiO/ sub2 / (157nm)相比，掺f样品的吸收边位于更短的波长(153 nn)。

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Interaction of F/sub 2/ excimer laser light with various types of synthetic SiO/sub 2/ glasses: towards the 3rd generation of synthetic silica

The authors consider the VUV-UV optical transmission spectra of synthetic silica specimens before and after F/sub 2/ laser irradiation. The absorption edge in the specimens differs from sample to sample: the absorption edge of the F-doped specimen is located at a shorter wavelength (153 nn) compared with the wet SiO/sub 2/ (155 nm) or the dry SiO/sub 2/ (157nm).

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Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

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