小间距FCCSP基板设计优化,用于模压下填料无空隙评价

F. Yen, V. Lin, Yu-Po Wang
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引用次数: 0

摘要

随着倒装芯片技术的快速发展,特别是在转移成型过程中使用模压下填料(MUF),倒装芯片微电子产品(FCCSP)的成型能力面临着越来越大的挑战,如降低离体高度和精细凹凸间距(高凹凸密度)。有一个重要的挑战,面临着严重的气穴困在模具区域(气穴集中在凸起区域)。通常,实验涉及大量的DOE矩阵,花费大量的时间和材料(虚拟模具,衬底,模具复合材料等)来解决这个空隙问题。基于以上原因,模流仿真可以应用成型参数,找出不同基板阻焊图案设计的MUF FCCSP无空隙风险的最佳解决方案,从而缩短量产前的开发周期。本文采用可应用传递成型工艺参数的三维模流仿真软件。模区内有不同开孔面积百分比(指状)设计的基板阻焊片,模区内有20um深度结构的阻焊片开孔区域,以实现不同的熔前行为。通过研究,得出了改善FCCSP(MUF)在传递成型过程中成型性能的一些结论。具有65um高度结构的FCCSP(MUF)具有较低的空气空洞风险,因为模具化合物可以在具有更多流动空间的模具区域下轻松流动。此外,当基板阻焊板开孔面积为25%,开孔图案设计与流动方向相同时,模具复合材料也具有良好的熔前流动,可以在模区下方获得更大的空间和顺畅的流动,减少成型过程中的空洞风险。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Substrate Design Optimization of Fine Pitch FCCSP for Molded Underfill Void Free Evaluation
The microelectronics products of Flip Chip-Chip Scale Package (FCCSP) with more increasing challenges are faced to assure molding capability with rapid advances in flip chip technology such as decreasing stand-off height and fine bump pitch (high bump density), especially when Molded Underfill (MUF) is used during transfer molding process. There is one important challenge that faced severe air void entrapment underneath the die region (air void concentrate among bumps region). Generally, the experiments involving a lot of DOE matrixes which spend a lot of time and materials (dummy die, substrate, mold compound…etc.) to solve this air void issue. As above reasons, the moldflow simulation can be used to apply molding parameters to find out optimum solutions for air void risk free of MUF FCCSP with different substrate solder mask pattern design which can reduce development cycle time before mass production. In this paper, 3D moldflow simulation software which can apply transfer molding process parameters is used. There is substrate solder mask with different opening area percentage (finger like) design within die region and molding compound flow to die region that solder mask opening area with 20um depth structure to perform different melt-front behavior. From this study, we can conclude some results for improvement molding performance of FCCSP(MUF) during transfer molding process. The FCCSP(MUF) with the 65um stand-off height structure performs low air void risk due to mold compound could easily flow under die region with more flow space. In addition, mold compound also performs well melt-front flow when the substrate solder mask with opening area as 25% and opening pattern design as horizontal as flow direction that both can get more space and smooth flow underneath die region to reduce void risk during molding process.
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