用于NSOM的亚波长孔径纳米硅截锥形光电探测器

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051465

Matityahu Karelits, Gilad Hirshfeld, Yaakov Mandelbaum, A. Chelly, A. Karsenty

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引用次数: 5

摘要

硅基光电探测器具有亚波长孔径，形状为截尾锥形探头，已经进行了电学和光学模拟。它专为NSOM设计，可以收集近场表面信息，具有传统光学显微镜无法获得的分辨率的明显优势。结果提出了一种很有前途的几种波长的器件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nanoscale silicon truncated conical photodetector at subwavelength aperture for NSOM applications

Silicon-based photodetector sharing subwavelength aperture and shaped as a truncated conical-probe, has been electrically and optically simulated. Designed for NSOM, it may collect near-field surface information with clear advantage of a resolution inaccessible by conventional optical microscopy. Results present a promising device for several wavelengths.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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