Qiang-sheng Wang, Junjie Li, Zongli Wang, C. Shi, Haijun Li, C. Gu
{"title":"多孔硅衬底上均匀碳锥阵列的场发射","authors":"Qiang-sheng Wang, Junjie Li, Zongli Wang, C. Shi, Haijun Li, C. Gu","doi":"10.1109/IVESC.2004.1414222","DOIUrl":null,"url":null,"abstract":"Uniform carbon cones arrays with average height of 1/spl mu/m were grown on porous silicon substrate using the hot filament chemical vapor deposition (HFCVD). Raman spectroscopy was used to characterize as-prepared carbon cones, which are composed of D peak (/spl sim/1352cm/sup -1/), G peak (-1601cm/sup -1/) and a broad peak at /spl sim/1475cm/sup -1/ attributed to hydrogenated carbon (a-C:H). It was found that both the immersion of porous silicon substrate in Fe/sub 2/(SO/sub 4/)/sub 3/ aqueous solution and the applied voltage in the deposition are vital to the growth of the carbon cones. Furthermore, the field emission properties of the as-prepared carbon cone arrays were studied, which shows an excellent field emission property. The threshold field is 2.2 V//spl mu/m, emission current of more than 80 /spl mu/A could be obtained as applied electric field is 3.4 V//spl mu/m. The internal-tip mechanism has been proposed for cone arrays in order to account for the observed field emission.","PeriodicalId":340787,"journal":{"name":"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Field emission of uniform carbon cone arrays grown on porous silicon substrate\",\"authors\":\"Qiang-sheng Wang, Junjie Li, Zongli Wang, C. Shi, Haijun Li, C. Gu\",\"doi\":\"10.1109/IVESC.2004.1414222\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Uniform carbon cones arrays with average height of 1/spl mu/m were grown on porous silicon substrate using the hot filament chemical vapor deposition (HFCVD). Raman spectroscopy was used to characterize as-prepared carbon cones, which are composed of D peak (/spl sim/1352cm/sup -1/), G peak (-1601cm/sup -1/) and a broad peak at /spl sim/1475cm/sup -1/ attributed to hydrogenated carbon (a-C:H). It was found that both the immersion of porous silicon substrate in Fe/sub 2/(SO/sub 4/)/sub 3/ aqueous solution and the applied voltage in the deposition are vital to the growth of the carbon cones. Furthermore, the field emission properties of the as-prepared carbon cone arrays were studied, which shows an excellent field emission property. The threshold field is 2.2 V//spl mu/m, emission current of more than 80 /spl mu/A could be obtained as applied electric field is 3.4 V//spl mu/m. The internal-tip mechanism has been proposed for cone arrays in order to account for the observed field emission.\",\"PeriodicalId\":340787,\"journal\":{\"name\":\"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVESC.2004.1414222\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVESC.2004.1414222","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Field emission of uniform carbon cone arrays grown on porous silicon substrate
Uniform carbon cones arrays with average height of 1/spl mu/m were grown on porous silicon substrate using the hot filament chemical vapor deposition (HFCVD). Raman spectroscopy was used to characterize as-prepared carbon cones, which are composed of D peak (/spl sim/1352cm/sup -1/), G peak (-1601cm/sup -1/) and a broad peak at /spl sim/1475cm/sup -1/ attributed to hydrogenated carbon (a-C:H). It was found that both the immersion of porous silicon substrate in Fe/sub 2/(SO/sub 4/)/sub 3/ aqueous solution and the applied voltage in the deposition are vital to the growth of the carbon cones. Furthermore, the field emission properties of the as-prepared carbon cone arrays were studied, which shows an excellent field emission property. The threshold field is 2.2 V//spl mu/m, emission current of more than 80 /spl mu/A could be obtained as applied electric field is 3.4 V//spl mu/m. The internal-tip mechanism has been proposed for cone arrays in order to account for the observed field emission.