使用SIMOX BOX进行高场电气测试

1995 IEEE International SOI Conference Proceedings Pub Date : 1995-10-03 DOI:10.1109/SOI.1995.526502

J. Yoon, J. Nee, J. Yap, J. E. Chung

{"title":"使用SIMOX BOX进行高场电气测试","authors":"J. Yoon, J. Nee, J. Yap, J. E. Chung","doi":"10.1109/SOI.1995.526502","DOIUrl":null,"url":null,"abstract":"This abstract describes one of the first attempts to apply high-field electrical testing to obtain BOX metrological information previously obtainable only via traditional physical analysis. The advantages of electrical analysis are several: it has a relatively low turn-around time, and provides high-volume statistical information about many BOX characteristics.","PeriodicalId":149490,"journal":{"name":"1995 IEEE International SOI Conference Proceedings","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1995-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Use of high-field electrical testing for SIMOX BOX metrology\",\"authors\":\"J. Yoon, J. Nee, J. Yap, J. E. Chung\",\"doi\":\"10.1109/SOI.1995.526502\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This abstract describes one of the first attempts to apply high-field electrical testing to obtain BOX metrological information previously obtainable only via traditional physical analysis. The advantages of electrical analysis are several: it has a relatively low turn-around time, and provides high-volume statistical information about many BOX characteristics.\",\"PeriodicalId\":149490,\"journal\":{\"name\":\"1995 IEEE International SOI Conference Proceedings\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1995 IEEE International SOI Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.1995.526502\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1995.526502","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本摘要描述了应用高场电气测试获得BOX计量信息的首次尝试之一，这些信息以前只能通过传统的物理分析获得。电分析的优点有几个:它有一个相对较低的周转时间，并提供关于许多BOX特性的大量统计信息。

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Use of high-field electrical testing for SIMOX BOX metrology

This abstract describes one of the first attempts to apply high-field electrical testing to obtain BOX metrological information previously obtainable only via traditional physical analysis. The advantages of electrical analysis are several: it has a relatively low turn-around time, and provides high-volume statistical information about many BOX characteristics.

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1995 IEEE International SOI Conference Proceedings

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