智能线路监控:通过集成和自动化的线路监控策略，最大限度地提高生产率

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731411

T. Pilon, M. Burns, V. Fischer, M. Saunders

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引用次数: 1

摘要

本文介绍了一种智能线路监控系统，并着重介绍了其优于传统线路监控系统的特点。通过引用IBM 0.25 /spl mu/m技术制造商的例子，我们展示了集成和自动化的生产线监控策略减少了获得结果的时间，提供了较低的拥有成本，并提供了较短的投资回报时间。本文还探讨了这种系统的自然扩展和生长可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Intelligent line monitor: maximum productivity through an integrated and automated line monitoring strategy

This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 /spl mu/m technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored.

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来源期刊

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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