台式正电子映射工具的构建和性能

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Pub Date : 2002-09-01 DOI:10.1109/IIT.2002.1258010

P. Coleman, C. P. Burrows, A. Knights, B. Sealy, R. Gwilliam

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引用次数: 0

摘要

设计并制作了一台结构紧凑、使用方便的正电子束湮没光谱仪。介绍和讨论了设计特点、性能和初步结果。描述了可能的应用，包括离子剂量测定和制图，SIMOX过程控制，空隙监测和薄膜询问。

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Construction and performance of a bench-top mapping positron alpha tool

A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.

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Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on

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