用于新兴无线系统和射频传感应用的RF MEMS-MMIC构建模块

2009 European Microwave Integrated Circuits Conference (EuMIC) Pub Date : 2009-09-01 DOI:10.23919/eumc.2009.5296438

R. Malmqvist, C. Samuelsson, P. Rantakari, P. Frijlink, D. Smith, W. Simon, J. Saijets, T. Vaha-Heikkila, R. Baggen

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引用次数: 1

摘要

在本文中，我们介绍了在泛欧研究活动中获得的主要范围和初步结果，旨在将创新RF MEMS开关成功集成到标准GaAs MMIC工艺技术中。由OMMIC代工厂开发的制造欧姆接触型RF MEMS开关的测量结果显示出有希望的结果，例如在低RF损耗方面(从高达30 GHz的直流获得0.2-0.4 dB)。实验验证的基于GaAs的RF MEMS开关已进一步用于设计低损耗的MMIC构建模块，如开关，匹配和相移电路，用于高达40 GHz的各种RF应用。

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RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2–0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz.

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2009 European Microwave Integrated Circuits Conference (EuMIC)

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