高光功率对光学MEMS的影响

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607832

O. Spahn, L. Phinney, C.C. Wong, W. Cowan, D. Adams, G. Grossetete

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引用次数: 7

摘要

许多应用需要光学MEMS器件来处理高光功率。我们提出了SUMMiTtrade制造的反射镜和其他结构的理论和实验结果，说明了性能限制和几种缓解策略。

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Impact of high optical power on optical MEMS

A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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