Electromagnetic Measurement Techniques for Materials and Device Used in 6G Wireless Communications

AIST are researching and developing the electromagnetic measurement technique for materials and circuits used in the 6th generation wireless telecommunication. One of key factor in measurement technologies are operation frequency range. In this paper, balanced type circular disc resonator (BCDR) has been recognized as an accurate measurement method of complex dielectric constant for low loss dielectric materials expanded frequency range up to 170 GHz. On the other hand, for scattering parameter, S-parameter, measurement of planar devices and circuits, precision on-wafer circuit measurement has been achieved by fully automatic prober system with high accuracy up to 340 GHz. In the presentation, material characterization is demonstrated for synthetic resin, and the original on-wafer measurement technique producing scattering parameter measurement with high reproducibility up to 340 GHz.