Wollaston棱镜干涉仪平面内二自由度位移测量

2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA) Pub Date : 2018-07-01 DOI:10.1109/MESA.2018.8449196

H. Hsieh, Ju-Yi Lee, B. Sun, Gang-Yu Fan

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引用次数: 1

摘要

研制了一种基于Wollaston棱镜(WP)的平面内位移测量干涉仪。该测量系统由外差光源和高质量WP组成，可提供精度高、稳定性好的2自由度平面内位移测量。实验表明，该系统具有5 nm的分辨率，并能抵抗外界干扰和内部误差。

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2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.

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2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)

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