带有PZT有源层和残余应力的100 kHz空气耦合PMUT:多物理场模型和实验验证

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2017-04-01 DOI:10.1109/EUROSIME.2017.7926253

G. Massimino, L. D'Alessandro, F. Procopio, R. Ardito, M. Ferrera, A. Corigliano

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引用次数: 15

摘要

本文对空气耦合压电微机械超声换能器(PMUT)进行了完整的多物理场有限元建模，并对其力学和声学响应进行了实验验证。

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Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation

In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses.

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来源期刊

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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