n型双栅无结晶体管的性能分析

Shweta Yadav, V. Mishra, R. Chauhan
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引用次数: 0

摘要

本文对通道长度为18nm的电荷等离子体双栅无结晶体管的TCAD仿真进行了分析。与传统的无结晶体管(JLT)相比,该结构具有更好的离子/OFF比(107)。利用电荷等离子体的概念诱导n+-n+-n+区域,产生自由载流子进行导电,使所设计结构的制造过程更加容易。由于设计的器件工作在4.74eV的功函数值下,减少了jlt使用高栅金属功函数的限制。衬底区域被轻且均匀地掺杂,这导致随机掺杂波动减少,从而导致器件的阈值电压变化较小。研究了该装置对各种参数变化的灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Performance analysis of N-type double gate junctionless transistor
In this paper, the TCAD simulation of charge plasma based double gate junction-less transistor with channel length of 18nm is analyzed. The structure shows better ION/OFF ratio(107) compared to the conventional junction less transistors (JLT). The use of charge plasma concept for inducing n+-n+-n+ regions and generating free charge carrier for conduction makes the process of fabrication easier for the designed structure. The designed device since works at work-function value of 4.74eV, it reduces the constraints of using high gate metal work-function for JLTs. The substrate region is lightly and uniformly doped, which results in decreased random dopant fluctuation and hence results in less variation in threshold voltage of the device. The sensitivity of device to various parameter variations is investigated.
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