纳米材料传感器制造自动化与优化装置

2021 13th Spanish Conference on Electron Devices (CDE) Pub Date : 2021-06-09 DOI:10.1109/CDE52135.2021.9455751

J.P. Santos, C. Sánchez-Vicente, A. Azabal, S. Ruiz-Valdepeñas, J. Lozano, I. Sayago, J. Sanjurjo

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引用次数: 2

摘要

这项工作提出了一种装置，“滴铸机”，开发用于自动化和优化使用滴铸技术的气体传感器敏感层的沉积过程。它的目的是为了开发不同材料的传感器，研究它们对不同气体化合物的行为和响应。

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Automation and optimization device for the fabrication of sensors with nanomaterials

This work presents a device, “dropcaster”, developed to automate and optimize the deposition process of the sensitive layer of gas sensors using the drop-casting technique. It is designed to development sensors in the research phase of different materials and the study of their behavior and response to different gaseous compounds.

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2021 13th Spanish Conference on Electron Devices (CDE)

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