A. Nastovjak, N. Shwartz, Z. Yanovitskaja, A. V. Zverev
{"title":"硅纳米晶须生长的蒙特卡罗模拟","authors":"A. Nastovjak, N. Shwartz, Z. Yanovitskaja, A. V. Zverev","doi":"10.1109/SIBEDM.2007.4292903","DOIUrl":null,"url":null,"abstract":"Examination of silicon nanowhiskers (NWs) growth on Si(111) surface activated by gold was carried out using Monte Carlo simulation. Dependence of NW length on gold drop size was obtained. It was shown that for given temperature and deposition rate there is optimal drop size corresponding to maximal whisker growth rate. Effect of surface wetting by drop material was investigated: for strong wettability whiskers grew curved and for weak - drop became too movable and could slide down from the whisker top. It was demonstrated that combination of two mechanisms of Si incorporation at Si-Au interface: diffusion through the drop bulk with following Si precipitation at interface and Si incorporation into drop perimeter due surface diffusion is the most optimal for vertical Si nanowhiskers growth.","PeriodicalId":106151,"journal":{"name":"2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Monte Carlo Simulation of Silicon Nanowhiskers Growth\",\"authors\":\"A. Nastovjak, N. Shwartz, Z. Yanovitskaja, A. V. Zverev\",\"doi\":\"10.1109/SIBEDM.2007.4292903\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Examination of silicon nanowhiskers (NWs) growth on Si(111) surface activated by gold was carried out using Monte Carlo simulation. Dependence of NW length on gold drop size was obtained. It was shown that for given temperature and deposition rate there is optimal drop size corresponding to maximal whisker growth rate. Effect of surface wetting by drop material was investigated: for strong wettability whiskers grew curved and for weak - drop became too movable and could slide down from the whisker top. It was demonstrated that combination of two mechanisms of Si incorporation at Si-Au interface: diffusion through the drop bulk with following Si precipitation at interface and Si incorporation into drop perimeter due surface diffusion is the most optimal for vertical Si nanowhiskers growth.\",\"PeriodicalId\":106151,\"journal\":{\"name\":\"2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-08-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIBEDM.2007.4292903\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBEDM.2007.4292903","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Monte Carlo Simulation of Silicon Nanowhiskers Growth
Examination of silicon nanowhiskers (NWs) growth on Si(111) surface activated by gold was carried out using Monte Carlo simulation. Dependence of NW length on gold drop size was obtained. It was shown that for given temperature and deposition rate there is optimal drop size corresponding to maximal whisker growth rate. Effect of surface wetting by drop material was investigated: for strong wettability whiskers grew curved and for weak - drop became too movable and could slide down from the whisker top. It was demonstrated that combination of two mechanisms of Si incorporation at Si-Au interface: diffusion through the drop bulk with following Si precipitation at interface and Si incorporation into drop perimeter due surface diffusion is the most optimal for vertical Si nanowhiskers growth.