为设计而制造:用设计者的语言来控制过程

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731551

D. Potts

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引用次数: 1

摘要

提出了一种从设计者的角度评价过程控制的方法，即从整体电气性能的角度来评价过程控制。技术表和一套全面的战略选择晶圆电气测试用于捕获和维护过程的电气特征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Manufacturing for design: putting process control in the language of the designer

A methodology is presented for evaluation of process control from the designer's perspective, that of overall electrical performance. Technology tables and a comprehensive set of strategically chosen wafer electrical tests are used to capture and maintain the electrical signature of a process.

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来源期刊

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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