用于纳米器件表征的相移干涉仪

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984182

P. Boher, J. Piel, J. Stehle, A. Dubois, A. Boccara

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引用次数: 1

摘要

提出了一种基于积分桶正弦相位调制技术的移相干涉测量方法。相位调制是通过物镜和附在压电陶瓷上的反射镜的正弦振荡实现的。相位图像以几赫兹的速率实时产生。该系统对振动不太敏感，具有良好的精度和可重复性，非常适合纳米器件的表征。

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Phase shifting interferometer for the characterization of nanodevices

A new phase shifting interferometry based on the integrating-bucket technique with sinusoidal phase modulation is presented. The phase modulation is achieved by sinusoidal oscillation of an objective and a mirror attached to a PZT. Phase images are produced in real time at a rate of several Hertz. The system is not very sensitive to the vibrations and gives excellent accuracies and repeatabilities which makes it very suitable to the characterization of the nanodevices.

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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