Overcoming the barriers to cleaning with bubble-free ozonated de-ionized water

The need for significant reductions in water consumption as 300 mm wafer processes are commercialized is driving the development of revolutionary new wet cleaning processes. Most of these new processes incorporate ozonated de-ionized water as a key processing step. The use of membrane contactors to infuse ozone into water uniquely enables the production of bubble-free de-ionized water. Bubble-free ozonated fluids are the critical enabling technology for the next generation of critical cleaning.