HST反射校正器的非球面反射镜测量

J. Kumler, G. Gunnarsson, C. G. Hull-Allen
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引用次数: 0

摘要

随着先进的自动化制造技术的出现,复杂非球面空间光学生产的限制因素是提高精确测量和表征光学表面参数的能力。除了提高精度外,计量学还需要跟上计算机控制抛光等先进图形技术的制造周期缩短的步伐。因此,重点是:1)集成测试方法。仪器,如干涉仪必须与抛光机和性能预测软件接口,以尽量减少所需的时间来执行一个完整的计量周期。2)测试冗余。每个表面参数在两个独立的,互补的测试方法中测量,使用独特的测试设备。这最大限度地减少了系统误差的风险,减少了测量的不确定性。3)测量带宽重叠。选择用于评估表面误差的测试方法,以确保对所有空间周期进行充分采样,并获得镜面的完整表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Aspheric Mirror Metrology for the HST Reflective Correctors
With the advent of advanced, automated fabrication techniques, the limiting factor in the production of complex aspheric space optics is increasing the ability to accurately measure and characterize optical surface parameters. In addition to increased accuracy, the metrology is required to keep pace with the shorter fabrication cycles of advanced figuring techniques such as computer-controlled polishing. As a result, there is an emphasis on: 1) Integrated testing approaches. Instruments such as interferometers must be interfaced with the polishing machine and the performance prediction software in order to minimize the time required to perform a full metrology cycle. 2) Redundancy in testing. Each surface parameter is measured in two independent, complementary test methods using unique test equipment. This minimizes the risk of systematic errors and reduces measurement uncertainty. 3) Overlapping measurement bandwidths. Test methods used to evaluate the surface errors are selected to ensure all spatial periods are adequately sampled and a complete characterization of the mirror surface is obtained.
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