溶胶-凝胶浸渍法制备锡掺杂氧化锌薄膜的电导率特性

2014 International Symposium on Technology Management and Emerging Technologies Pub Date : 2014-05-27 DOI:10.1109/ISTMET.2014.6936483

A. Shafura, N. D. Md Sin, N. Azhar, I. Saurdi, M. H. Mamat, Uzer M, M. Rusop

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引用次数: 1

摘要

采用溶胶-凝胶浸泡法制备了锡掺杂氧化锌(sn -掺杂ZnO)薄膜。这些薄膜在不同的掺杂浓度下生长。利用电流-电压(IV)测量和场发射扫描电镜(FESEM)对未掺杂和掺杂薄膜进行了电学和结构表征。从本研究可知，掺杂浓度的变化会影响材料的电性能。薄膜的电导率随掺杂浓度的增加而增加。本文还指出了薄膜的表面形貌。

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Electrical conductivity characteristics of tin-doped Zinc Oxide thin film deposited using sol-gel immersion method

Tin-doped Zinc Oxide (Sn-doped ZnO) thin film has been deposited onto glass substrates using sol-gel immersion method. These thin films are grown at different doping concentrations. The electrical and structural characterizations of the undoped and doped films were carried out using current-voltage (IV) measurement and field emission scanning electron microscopy (FESEM). From this study, it is known that, electrical properties were influenced by varying the doping concentration. Conductivity of thin films was found to increase as the doping concentrations increased. Also indicates in this paper the surface morphology of the thin film.

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2014 International Symposium on Technology Management and Emerging Technologies

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