通过缩放改善碳纳米管场效应管的可变性

68th Device Research Conference Pub Date : 2010-06-21 DOI:10.1109/DRC.2010.5551959

Yanning Sun, George Tuleski, Shu-Jen Han, W. Haensch, Zhihong Chen

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引用次数: 1

摘要

碳纳米管晶体管由于其直径的变化而表现出较大的性能变化，这对于超大规模集成电路技术是不可接受的。我们证明，通过适当的缩放，我们可以在90%的纳米管器件中达到>2 mA/µm的导通电流。更重要的是，我们证明了适当的缩放可以将电流变化减少2个数量级，并减轻管径分布的影响。

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Improve variability in carbon nanotube FETs by scaling

Carbon nanotube transistors are shown to have large performance variation due to their diameter variation, which is not acceptable to VLSI technology. We demonstrate that by proper scaling we can reach >2 mA/µm on-state current in 90% of our nanotube devices. More importantly, we demonstrate proper scaling can reduce the current variation by 2 orders of magnitude and mitigate the impact of tube diameter distribution.

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68th Device Research Conference

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