一种全差分、多路传感接口电路与三轴纯氧化物电容式CMOS-MEMS加速度计单片集成

Yu-Chia Liu, M. Tsai, Sheng-Shian Li, W. Fang
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引用次数: 5

摘要

本文演示了将CMOS多通道读出电路和三轴电容式加速度计集成在单个芯片上。首次提出并演示了三轴机械结构和单片三轴多路加速度计接口电路。该系统具有以下特点:(1)通过基于时序的读出电路实现最小的芯片尺寸;(2)全差分感知机制提高了信噪比(SNR);(3)纯氧化层的堆叠作为机械结构,提高了温度稳定性。因此,传感系统不仅减小了芯片的总尺寸,而且显著提高了系统的整体性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers
The integration of a CMOS multi-channel readout circuit and tri-axis capacitive accelerometers on a single chip has been demonstrated in this work. The tri-axis mechanical structure together with the monolithic tri-axis multiplexed accelerometer interface circuit is proposed and demonstrated for the first time. Such a system exhibits the following features: (1) the smallest chip size is realized by a timing-based readout circuit; (2) the signal-to-noise ratio (SNR) is enhanced by a fully differential sensing mechanism; and (3) the stacking of the pure oxide layers, serving as the mechanical structures, enhances temperature stability. As a result, the sensing system not only reduces the total chip size but significantly improves the overall system performance.
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