用低分辨率微型光纤光谱仪测量距离和位移的干涉测量技术

P. Hlubina, I. Gurov
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引用次数: 1

摘要

在测量两种不同光源下的距离和位移时,验证了利用低分辨率微型光纤光谱仪分辨光谱域双光束干涉技术的可行性。首先,在色散迈克尔逊干涉仪配置中使用低相干源(即多模激光二极管TOLD 9140)时,利用实测光谱干涉图与理论光谱干涉图之间的互相关程序来估计干涉仪一个反射镜不同位置对应的光束之间的群光程差(OPDs),并用于位移评估。其次,当非色散迈克尔逊干涉仪配置中使用白光光源,即卤素灯时,对测量到的光谱干涉图进行锁相环(PLL)处理,得到干涉仪中光束之间或位移对应的群opd。锁相环是之前提出的一般递归非线性数据处理方法的特殊简化版本。锁相环方法采用迭代方式实现,提供了解包裹光谱条纹相位恢复。通过对实测光谱干涉图的处理,研究了迭代锁相环法的精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measuring distances and displacements by an interferometric technique using a low-resolution miniature fiber optic spectrometer
The feasibility of the technique utilizing the spectral-domain two-beam interference resolved by a low-resolution miniature fiber optic spectrometer is demonstrated in measuring distances and displacements when two different light sources are used. First, when a low-coherence source, namely a multimode laser diode TOLD 9 140 is used in the configuration of a dispersive Michelson interferometer, a cross-correlation procedure between the measured and the theoretical spectral interferograms is applied to estimate the group optical path differences (OPDs) between beams corresponding to different positions of one of the mirrors of the interferometer and needed in the displacement evaluations. Second, when a white-light source, namely a halogen lamp is used in the configuration of a non-dispersive Michelson interferometer, the measured spectral interferograms are processed by a phase locked loop (PLL) method, which is a special simplified version of the general recurrence non-linear data processing method previously presented, to obtain the corresponding group OPDs between beams in the interferometer or the displacements. The PLL method is realized in iterative mode which provides the unwrapped spectral fringe phase recovery. The accuracy of the iterative PLL method is investigated via processing the measured spectral interferograms.
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