微机电系统运行可靠性参数确定模型的建立

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283445

M. Melnyk, V. Teslyuk, I. Farmaha, V. Karkulyovskyy, S. Moroz

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引用次数: 1

摘要

可靠性是任何工业和消费产品开发的关键问题。采用MEMS技术的产品也不例外。可靠性的核心问题是，无论产品的设计和制造多么复杂，如果它不能在预期的使用寿命内提供设计性能，它就会变得无用。本文建立了微机电系统可靠性参数确定的数学模型。以一个由n个传感器、n个信息处理通道和n个执行器组成的微器件为例。该系统的可靠性取决于其所有元件的可靠性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The Development of Model for Parameters for MEMS Operating Reliability Determination

Reliability is a critical issue in any industrial and consumer product development. The products using MEMS technology is no exception. The central issue of reliability is that no matter how sophisticated a product is designed and manufactured, it becomes useless if it fails to deliver the designed performance during the expected lifetime. In this paper, the mathematical model for determination of MEMS reliability parameters is presented. As an example a micro device consisting of n sensors, n information processing channels and n actuators. Reliability of this system depends on reliability of all its elements.

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2007 International Conference on Perspective Technologies and Methods in MEMS Design

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