带数字读数的全集成mu -pirani压力表的制造和性能

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148848

C. Mastrangelo, R. Muller

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引用次数: 29

摘要

一种加热微桥型热绝对压力传感器集成了一个有源偏置电路和一个8位连续逼近寄存器(SAR)模数(A/D)转换器。该芯片包含约1000个mosfet，可测量10至10/sup / Pa之间的绝对气体压力，并采用14掩模，4 μ m NMOS技术与微传感器工艺相结合。介绍了mu -pirani压力表的制作工艺和传感性能。

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Fabrication and performance of a fully integrated mu -pirani pressure gauge with digital readout

A thermal absolute pressure sensor of the heated microbridge type has been integrated with an active bias circuit and an 8-bit successive-approximation register (SAR) analog-to-digital (A/D) converter. The chip, which contains about 1000 MOSFETs, measures absolute gas pressure between 10 to 10/sup 4/ Pa, and it is implemented in a 14-mask, 4- mu m NMOS technology merged with the microsensor process. The fabrication process and sensing performance of the mu -pirani gauge are described.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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