考虑参数变化影响的纳米级cmos器件总泄漏电流建模与估计

S. Mukhopadhyay, K. Roy
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引用次数: 28

摘要

在本文中,我们开发了分析模型来估计栅极,亚阈值,反向偏置源/漏极带到带隧道(BTBT)的平均值和标准差,以及考虑器件几何形状,掺杂轮廓,平带电压和电源电压等工艺参数变化的比例CMOS器件中的总泄漏。利用有效长度为50 nm的NMOS器件对模型进行了蒙特卡罗仿真验证,并对结果进行了分析,列举了不同工艺参数对各组分和总泄漏量的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling and estimation of total leakage current in nano-scaled-CMOS devices considering the effect of parameter variation
In this paper we have developed analytical models to estimate the mean and the standard deviation in the gate, the subthreshold, the reverse biased source/drain junction band-to-band tunneling (BTBT) and the total leakage in scaled CMOS devices considering variation in process parameters like device geometry, doping profile, flat-band voltage and supply voltage. We have verified the model using Monte Carlo simulation using an NMOS device of 50 nm effective length and analyzed the results to enumerate the effect of different process parameters on the individual components and the total leakage.
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