超频气体放电发生器，含金属等离子体刻蚀压电材料

Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289) Pub Date : 1999-09-21 DOI:10.1109/MIAME.1999.827841

L.N. Orlikov, N. L. Orlikov, S. Shandarov

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引用次数: 1

摘要

讨论了铌酸锂在10kv高压辉光放电条件下的蚀刻。在蚀刻腔中脉冲输入金属蒸汽，会导致放电放弃和高频振荡的产生。放电电路中的感应电容组合物产生频率5mhz。这有助于消除压电表面的放电，并将蚀刻速度提高到5mcm /h。

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Gas discharger generators of ultra-frequency a metal-bearing plasma to etching of piezoelectrics

The etching of lithium niobate in a high-voltage glow discharge with voltage of 10 KV is discussed. Pulsed supply of metal vapors into the etching chamber causes the discharge resignation and the generation of high frequency oscillations. An inductive-capacitate composition in a discharge circuit generates frequency 5 MHz. This helps to remove discharge from the piezoelectric surface and to increase the etching speed to 5 mcm/h.

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Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)

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